11 documents
Journal articles
- M. Yu. Tikhomirov, Yu. Spalek, P I Pivonenkov, E A Zhelonkin, L G Arkharova, et al.. Small-size silicon accelerometer with a thermally compensated signal in the temperature range of 0–200°C. Measurement Techniques, 1991, 34 (3), pp.262-265. ⟨10.1007/BF00978797⟩. ⟨hal-04094274⟩
- M. Yu. Tikhomirov, Yu. M. Spalek, V. N. Borshchev. Temperature Dependence of Sensitivity of Silicon Integrated Mechanical Transducer in The Temperature Range from -60°C to +200°C. Technology. Technology of Instrument Making: Scientific and Technical Collection, 1988, 13 (2), pp.80-100. ⟨10.13140/RG.2.2.35275.67362/3⟩. ⟨hal-04163200⟩
- Michael Tikhomirov, Boris Pivonenkov, Jakov Malkov. Silicon Microminiature Low-Frequency Accelerometer. Works of the Moscow Forestry Engineering Institute., 1985, 169, pp.83-85. ⟨10.5281/zenodo.7859356⟩. ⟨hal-04094278⟩
- M. Yu. Tikhomirov. Study of the Characteristics of the Measuring Circuit of the Silicon Integrated Mechanical Magnitude Transducer at Temperatures above +100℃. Works of the Moscow Forestry Engineering Institute, 1984, 158, pp.53. ⟨10.5281/zenodo.8061553⟩. ⟨hal-04131081v2⟩
- Michael Tikhomirov, Jakov Malkov. On the Possibility of Extending the Working Temperature Range of Silicon Integrated Mechanical Transducers. Works of the Moscow Forestry Engineering Institute., 1983, 151, pp.177-179. ⟨10.5281/zenodo.8079376⟩. ⟨hal-04141968⟩
- M. Yu. Tikhomirov, Yu. M. Spalek, K.Yu. Kharenko, N.P. Giletsky, P. N. Bogatov, et al.. Integrated Strain-Sensitive Element of Mechanical Transducer with Low Temperature Instability. Technology. Technology of Instrument Making: Scientific and Technical Collection, 1977, 3 (14), pp.19. ⟨10.5281/zenodo.8192119⟩. ⟨hal-04173163⟩
Patents
- M. Yu. Tikhomirov, Spalek Yu.M., Ponomarenko V.V., Borschev V.N.. Method for Determining the Resonant Frequency of Elastic. Russia, Patent n° : SU1516799A1. 1989. ⟨hal-04168235⟩
- M. Yu. Tikhomirov, V.A. Osipov, Yu. M. Spalek, K.Yu. Kharenko, V.N. Borschev. Method of Batch Production of Semiconductor Strain. Russia, Patent n° : SU1259104A1. 1986. ⟨hal-04168326⟩
Preprints, Working Papers
- M. Yu. Tikhomirov. Silicon Integrated Mechanical Sensor for Operation at Temperatures (0 ÷ 300) ℃. 1991. ⟨hal-04160942⟩
Reports
- M. Yu. Tikhomirov, Yu. M. Spalek, Yu.M. Morozov, K.Yu. Kharenko. Research, Development and Improvement of Manufacturing Technology of Integrated Transducers and Sensors of Energy Parameters, Including for Control and Regulation of Parameters of Technological Processes of MEA Production (Flexible Manufacturing Systems (FMS), Flexible Manufacturing Modules (FMP), Etc.). TECHNICAL REPORT on the theme 0-706-88. 1990. Scientific Research Technological Institute of Instrument Engineering. (USSR - Ukraine). 1990. ⟨hal-04173202⟩
Theses
- Michael Tikhomirov. Silicon Integrated Mechanical Sensors of Control, Monitoring, Regulation Systems for Temperature Range (0 ÷ 300)℃. Engineering Sciences [physics]. MLTI (now Mytischi Branch of Bauman Moscow State Technical University) Space Faculty, 1989. English. ⟨NNT : ⟩. ⟨tel-04024261v2⟩
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