Small-size silicon accelerometer with a thermally compensated signal in the temperature range of 0–200°C

March 1991. Measurement Techniques 34(3):262-265

DOI: 10.1007/BF00978797

We describe an integrated single-component inertial accelerometer with an input signal resistance strain gauge converter. The operation principle of the device and its design are well known. We propose a new version of the design, which improves certain metrological and performance characteristics of the instrument.
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