1988. Technology. Technology of Instrument Making: Collection of Scientific-Technical Documents /TsNTI “Poisk”, 3(14), 19–27. In English and Russian.
The creation of a silicon integrated sensing element for a transducer of mechanical quantities with high temperature stability of measurements in the range from -60℃ to +80℃ is considered. The optimum impurity concentrations in p-type diffusion resistors when the bridge circuit is powered by a DC current source (DCV) and a DC current source (DCC) are selected.
Tikhomirov, Michael Y.; Spalek, Yuri M.; Morozov, Yuri M.; et alThe report presents the results…
1991. Manuscript in R&D Report 925.24.432-90. DOI:10.13140/RG.2.2.29283.63526/2In English and Russian.In 1988-91, we were filing an invention…
1988. Technology. Technology of Instrument Making: CSTI “Poisk” , 13(2), 80–100. (USSR)For the output signal…
March 1991. Measurement Techniques 34(3):262-265 DOI: 10.1007/BF00978797 We describe an integrated single-component inertial accelerometer with…
Paper (Download) M. Yu. Tikhomirov. Silicon Integral Sensors of Mechanical Values of Control Systems for…